摘要:

We describe a miniature sputtering system incorporating an unconventional magnetron gun and a right angle sputtering geometry. The design essentially eliminates the negative ion resputtering effect encountered in the sputtering of highTcoxide films. The geometry is compatible with the in‐plane and conventional θ–2θ diffraction geometries and a chamber with two appropriate sector x‐ray windows has been constructed and operated at a synchrotron. Detailed data on the performance of the sputtering gun are presented.

ISSN:0734-2101    

DOI:10.1116/1.577112

出版商:American Vacuum Society    

年代:1991

数据来源: AIP

摘要:

The model for the planar magnetron discharge is based on the resolution of the Boltzmann equation for the electron energy distribution function corresponding to the plasma region of the discharge. It assumes that electron transport is controlled by binary collisions; effects of Coulomb collisions are included. The influence of the main discharge parameters (gas density, discharge current and voltage) is studied. Comparison of the (Vd–Id) characteristics predicted by the model with experimental ones is made allowing some confidence in the model.

ISSN:0734-2101    

DOI:10.1116/1.577113

出版商:American Vacuum Society    

年代:1991

数据来源: AIP

摘要:

A simple analytical formula for thickness calculation which is especially fitted for the ion beam sputtering (IBS) system is derived. An arbitrary sputtering pattern can be treated in this formulation. This treatment, which greatly reduces the calculation time as compared with conventional ones, enables optimization of the IBS system design.

ISSN:0734-2101    

DOI:10.1116/1.577114

出版商:American Vacuum Society    

年代:1991

数据来源: AIP

摘要:

We present a macroscopic model for the growth of amorphous films produced by sputter deposition under conditions of high buffer gas pressure. Consistent with the latter assumption, we assume that incident flux approaches the surface from all angles of incidence. Explicit account is taken of two important physical effects: (i) surface diffusion and (ii) the fact that some parts of the surface will be geometrically shadowed from receiving flux by other parts of the surface. The physical variables which define the problem (e.g., deposition rate, surface diffusion constant, temperature, etc.) can be combined to form a characteristic length and a characteristic time which determine the rescaling required to reduce the problem of morphological prediction to a characterization of the initial conditions. All the well‐known features of columnar growth are found and a simple physical explanation for ‘‘survival of the fittest’’ columns is provided.

ISSN:0734-2101    

DOI:10.1116/1.577116

出版商:American Vacuum Society    

年代:1991

数据来源: AIP

摘要:

An underwater‐annealing technique has been developed to recover the original strength of fragile polystyrene (PS) microcapsules fabricated by an emulsion technique. PS microcapsules are heated up to 120 °C in a pressurized chamber prior to the dehydration process. This is done to recover the strength required for the pressure difference across the shell wall during fuel filling for inertial confinement fusion experiments.

ISSN:0734-2101    

DOI:10.1116/1.577117

出版商:American Vacuum Society    

年代:1991

数据来源: AIP

摘要:

A quadrupole mass spectrometer (QMS) with a specially designed analyzing head which was movable in a dynamic vacuum system was fabricated and the performance was tested. The head comprises a collimator and an airtight casing containing a rf tuning and its detection circuit. The rf circuit is tuned by supplying variable frequency of the rf voltage since the resonance frequency depends weakly on environmental temperature. This QMS can be obtain a normal mass spectrum for a mass range 1–50 amu even when the vessel is baked to 150 °C. The measured pressure rise of Ar is 1.08×10−5Pa at a distance of 125 mm from the effusing nozzle of argon gas with a flow rate of 1.9×10−5Pa m3 s−1, which is two times as large as the calculated value.

ISSN:0734-2101    

DOI:10.1116/1.577118

出版商:American Vacuum Society    

年代:1991

数据来源: AIP

摘要:

The planar flow of a rarefied gas subject to pressure and temperature gradients is a problem of fundamental interest in vacuum science and technology. This problem is solved based on the linearized Boltzmann equation with the assumption of a rigid sphere molecular interaction and Maxwell’s gas–surface interaction operator. Comprehensive numerical results for the macroscopic flow profiles, and the integrated flow rates for arbitrary Knudsen numbers are obtained. The results are basic to study of planar flows of rarefied gases.

ISSN:0734-2101    

DOI:10.1116/1.577119

出版商:American Vacuum Society    

年代:1991

数据来源: AIP

摘要:

A simple leak artifact has been developed using a single orifice only a few microns in diameter. The new single orifices have been calibrated over several orders of magnitude in leak rate by varying the gas pressure applied to one side of the element. The short term stability of the leak rate is limited primarily by the stability of the applied pressures. Long term stability appears to be limited by the cleanliness of the orifice and calibration system. The typical calibration curves obtained will be presented.

ISSN:0734-2101    

DOI:10.1116/1.577120

出版商:American Vacuum Society    

年代:1991

数据来源: AIP

摘要:

Monocrystalline Mo tips oriented to [110] are shown to be sharpened into atomic dimensions, by inert‐gas ions impinging along the [110]axis. Xe+ions accelerated to a few keV provided Mo tips less than 50 Å in apex diameter, in a time interval of 10 min or so. Much smaller radii of curvature were achieved by prolonged Ar+sputtering at lower energies. It is believed that the technique proposed is promising for preparing focused ion and electron beam sources.

ISSN:0734-2101    

DOI:10.1116/1.577121

出版商:American Vacuum Society    

年代:1991

数据来源: AIP

ISSN:0734-2101    

DOI:10.1116/1.577122

出版商:American Vacuum Society    

年代:1991

数据来源: AIP