摘要:

A continuous feed, high‐speed input/output device for controlled atmospheres has been developed and built for an electron‐beam tester. This device permits a throughput of 12 substrates per minute (36‐mm metallized ceramic) through a high‐vacuum (5.0×10−7Torr) chamber. This paper describes the input/output apparatus, its operation, and its performance. Furthermore, special emphasis is given to the unique high‐vacuum, gas‐bearing valves used in this application.

ISSN:0734-2101    

DOI:10.1116/1.574987

出版商:American Vacuum Society    

年代:1988

数据来源: AIP