摘要:

A new sputter‐ion pump structure is proposed, wherein magnets reside within the Penning cell assembly. Magnetic fields in the cell assembly are calculated and found to have the necessary intensity to ignite and sustain a Penning discharge. This structure has a possibility of realizing a compact ion pump although it has some problems, such as a somewhat high fringing magnetic field, and limit of baking temperature.

ISSN:0734-2101    

DOI:10.1116/1.578892

出版商:American Vacuum Society    

年代:1994

数据来源: AIP

摘要:

We report on the growth and properties of high mobility polycrystalline silicon films grown at low temperatures (400–500 °C) on amorphous substrates using a controlled reactive plasma beam deposition. The technique consists of carefully controlling the H radical flux from an electron cyclotron resonance (ECR) plasma to promote both nucleation and grain boundary passivation during growth. Using electrical and optical spectroscopy of the ECR plasma, we find that the density of H radicals impinging on the surface is one of the most important parameter controlling crystallinity of the film, and that by changing this flux, we can controllably alter the structure of the film from amorphous to polycrystalline. Unlike traditional deposition techniques for polysilicon, which requires either high deposition temperatures (650 °C) or a low temperature deposition followed by a post deposition anneal to achieve good mobilities, our technique produces films with mobilities of the order of 30–40 cm2/V s in as grown films at considerably lower temperatures. We have produced undoped and highly doped films using this technique.

ISSN:0734-2101    

DOI:10.1116/1.578893

出版商:American Vacuum Society    

年代:1994

数据来源: AIP

ISSN:0734-2101    

DOI:10.1116/1.578894

出版商:American Vacuum Society    

年代:1994

数据来源: AIP

摘要:

Insitunormal incidence transmission anisotropy is used to monitor changes in the polarization parameters Ψ and Δ induced by temperature gradients as substrates are heated and cooled in vacuum. Strategies for managing the polarization effects, so that they do not mask anisotropic effects in thin films, are discussed.

ISSN:0734-2101    

DOI:10.1116/1.578895

出版商:American Vacuum Society    

年代:1994

数据来源: AIP

ISSN:0734-2101    

DOI:10.1116/1.578896

出版商:American Vacuum Society    

年代:1994

数据来源: AIP

ISSN:0734-2101    

DOI:10.1116/1.578897

出版商:American Vacuum Society    

年代:1994

数据来源: AIP

ISSN:0734-2101    

DOI:10.1116/1.578898

出版商:American Vacuum Society    

年代:1994

数据来源: AIP

ISSN:0734-2101    

DOI:10.1116/1.578899

出版商:American Vacuum Society    

年代:1994

数据来源: AIP