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| 101. |
A comparison of boron emission characteristics for liquid metal ion sources of PtB, PdB, and NiB |
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Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena,
Volume 6,
Issue 1,
1988,
Page 491-495
L. W. Swanson,
A. E. Bell,
G. A. Schwind,
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摘要:
The relative abundance, angular intensities, and energy distribution of B+emitted from liquid metal ion sources of Ni4B6, Pd4B6, and Pt4B6alloys on carbon are measured as functions of total emission current. Evidence is presented that shows the NiB system to possess the highest concentration of B in the liquid phase which, in turn, leads to the highest electric field at the emitting site for this system. While the NiB system exhibits the highest angular intensity for the B+species, it also displays the highest value of the energy spread of B+.
ISSN:1071-1023
DOI:10.1116/1.584049
出版商:American Vacuum Society
年代:1988
数据来源: AIP
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| 102. |
Summary Abstract: Qualitative description of cluster and droplet emission from liquid‐metal ion sources |
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Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena,
Volume 6,
Issue 1,
1988,
Page 496-497
A. Bahasadri,
K. Pourrezaei,
M. Francois,
D. Nayak,
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PDF (197KB)
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ISSN:1071-1023
DOI:10.1116/1.584050
出版商:American Vacuum Society
年代:1988
数据来源: AIP
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| 103. |
Characteristics of a helium field ion gun |
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Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena,
Volume 6,
Issue 1,
1988,
Page 498-501
Morikazu Konishi,
Masaaki Takizawa,
Toshiro Tsumori,
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PDF (310KB)
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摘要:
A helium field ion gun for a focused ion beam system was designed and constructed. The main feature of the ion gun structure is the use of a gas jet nozzle with a tungsten field emitter tip near the nozzle end. Since the helium gas jet is collimated towards the emitter tip, the local pressure in the vicinity of the tip is kept 110 times higher than the value for the location of the ion gauge which is about 20 cm away from the helium jet ion gun. Using this ion gun, current density of 1 μA/sr was obtained although the helium gas flow rate ejected from the nozzle is as small as 1.6×10−3Torr l/s. This result indicates high efficiency of the helium gas supply to the emitter tip surface.
ISSN:1071-1023
DOI:10.1116/1.584051
出版商:American Vacuum Society
年代:1988
数据来源: AIP
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