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61. |
Summary Abstract: High resolution electron microscopy of CaF2/silicon interfaces |
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Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena,
Volume 4,
Issue 4,
1986,
Page 1121-1122
F. A. Ponce,
G. B. Anderson,
M. A. O’Keefe,
L. J. Schowalter,
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ISSN:1071-1023
DOI:10.1116/1.583553
出版商:American Vacuum Society
年代:1986
数据来源: AIP
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62. |
Initial formation of the interface between a polar insulator and a nonpolar semiconductor: CaF2on Si(111) |
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Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena,
Volume 4,
Issue 4,
1986,
Page 1123-1127
Marjorie A. Olmstead,
R. I. G. Uhrberg,
R. D. Bringans,
R. Z. Bachrach,
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摘要:
The initial stages of interface formation between CaF2and Si(111) have been studied with both core‐level and angle‐resolved valence band photoemission spectroscopy. Both the Si 2pand Ca 3pcore levels indicate that a Si–Ca bond is present at the CaF2–Si(111) interface. Annealing of thin CaF2films at 700–800 °C results in preferential evaporation of F, and the surface undergoes a number of reconstructions until a stable Si(111):Ca 3×1 reconstruction is obtained on which there is calcium, but no fluorine. This surface exhibits a surface state with an upward dispersion of 0.4 eV towards theK̄ point of the 1×1 surface Brillouin zone. Our results show that the CaF2molecule can be dissociated on the Si(111) surface at typical epitaxial growth temperatures, with the Ca being more strongly adsorbed to the Si than is the F.
ISSN:1071-1023
DOI:10.1116/1.583554
出版商:American Vacuum Society
年代:1986
数据来源: AIP
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63. |
Summary Abstract: Passivation of InP by plasma deposited phosphorus: Effects of surface treatment |
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Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena,
Volume 4,
Issue 4,
1986,
Page 1128-1129
R. Schachter,
M. Viscogliosi,
L. A. Bunz,
D. J. Olego,
H. B. Serreze,
P. M. Raccah,
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PDF (117KB)
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ISSN:1071-1023
DOI:10.1116/1.583555
出版商:American Vacuum Society
年代:1986
数据来源: AIP
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64. |
Unified disorder induced gap state model for insulator–semiconductor and metal–semiconductor interfaces |
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Journal of Vacuum Science&Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena,
Volume 4,
Issue 4,
1986,
Page 1130-1138
Hideki Hasegawa,
Hideo Ohno,
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摘要:
The energy location for the interface state densityNssminimum of the insulator–semiconductor (I–S) interface and the Fermi‐level pinning position at the metal–semiconductor (M–S) interface are shown to coincide and to lie at the same position of 5.0 eV from the vacuum level for major tetrahedral semiconductors. Neither the unified defect model nor the metal induced gap state model can explain the novel striking correlation between the I–S and M–S interfaces. The correlation as well as the observed peculiar photoionization behavior of the I–S interface are explained by the novel unified disorder induced gap state (DIGS) model where DIGS pin or restrict the movement of the surface Fermi level. The above characteristic energy,EHO, is shown to be the Fermi energy of the DIGS spectrum which is given by the hybrid orbital energy of thesp3bond of the host. The DIGS model explains remarkably well the behavior of the M–S interface formed on the bare or oxide covered semiconductor surface as well as the various features ofNssdistribution of the I–S interface. The correlation between the DIGS‐free heterojunction (S–S) interface and M–S/I–S interface is explained by the fact thatEHOis a universal reference energy level of the host which is invariant under any off‐diagonal interactions, as is evidenced by the alignment of transition metal deep levels, DX centers and EL2 with respect toEHO. Band offset at the S–S interface is proposed to be determined by the alignment ofEHOwhich inevitably involves formation of interface dipole when twoEHOlevels lie at different positions from the vacuum level.
ISSN:1071-1023
DOI:10.1116/1.583556
出版商:American Vacuum Society
年代:1986
数据来源: AIP
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