摘要:

AbstractA unified account is given of the normal mode theory of homogeneous unmagnetized plasma. Electron (Langmuir), ion sound and electromagnetic waves are treated in stable and (Penrose) unstable plasma with the Van Kampen‐Case formalism, using generalized functions. Simplified formulae are derived for second‐order Langmuir waves, taking full account of free‐streaming ef

ISSN:0005-8025    

DOI:10.1002/ctpp.19820220202

出版商:WILEY‐VCH Verlag    

年代:1982

数据来源: WILEY

摘要:

AbstractThe compactness has been proved of the inscattering operator covering elastic, exciting and deexciting processes between electrons and heavy neutral particles. Starting point is the proof of the boundedness of the different inscattering operators for the individual collision processes using certain assumptions on the structure of the corresponding differential cross sections. Then, under somewhat more confined conditions the proff of compactness could be performed with the aid of the square integrability of an eightfold iterated kernel. On the basis of this property it was possible to draw conclusions with regard to the spectrum of the total collision operator. They are related to the continuous as well as the discrete part of the spectrum and are discussed in detail. For elastic collisions additional statements can be deduced from our investigation.

ISSN:0005-8025    

DOI:10.1002/ctpp.19820220203

出版商:WILEY‐VCH Verlag    

年代:1982

数据来源: WILEY

摘要:

AbstractIncluding excitation and de‐excitation processes, direct and stepwise processes of the ionization, the particle balance and the energy balance of a positive column are jointly studied. It is shown that even near the axis the energy flux due to the radial electron drift can be only neglected provided that the mean electron energy is considerably less than the ionization energy. In some cases, it appears easier to apply the total energy balance instead of the energy balance of the electron gas alon

ISSN:0005-8025    

DOI:10.1002/ctpp.19820220204

出版商:WILEY‐VCH Verlag    

年代:1982

数据来源: WILEY

摘要:

AbstractA method of simulation of turbulent are fluctuations is suggested which is based on the probabilistic set description of conducting channel displacements over the plane not nodes with taking into account the turbulent eddies causing non‐uniformity of the field of displacements. The problem is treated in terms of the random set theory. Methods to control the displacements by varying the local displacement sets are described.A local‐set approach in the turbulent are simulation is used for a statistical study of the are form evolution in a turbulent gas flow. The method implies the performance of numerical experiments on a computer. Various ways to solve the problem of control of the geometric form of an are column on a model are described. Under consideration are the problems of organization of physical experiments to obtain the required information for the identification of local sets. The suggested method of the application of mathematical experiments is associated with the principles of an operational g

ISSN:0005-8025    

DOI:10.1002/ctpp.19820220205

出版商:WILEY‐VCH Verlag    

年代:1982

数据来源: WILEY

摘要:

AbstractTwo methods are described to determine local parameters of the unsteady asymmetric plasma. The basis of one method is the parametric approach. This method is used to determine plasma parameters in the case when an assumption can be made on the shape of the intensity isolines. The temperature field was calculated according to the intensity distributions inXdirection obtained simultaneously from two lines of sight. The second method was applied for measurements in arbitrary plasma configuration. In this case the temperature fields were calculated according to measurements from lines of sight simultaneously, and the obtained data were used in the Radon transformation inversion.

ISSN:0005-8025    

DOI:10.1002/ctpp.19820220206

出版商:WILEY‐VCH Verlag    

年代:1982

数据来源: WILEY

摘要:

AbstractThe influence of the beam energy and beam current density on the parameters of the plasma is investigated. The efficiency of carrier generation by collective interactions (Langmuir‐oscillations) is compared with that by the single collision mechanism. The additional negative charging of the static probe caused by the beam electrons is used for the determination of the beam electron densit

ISSN:0005-8025    

DOI:10.1002/ctpp.19820220207

出版商:WILEY‐VCH Verlag    

年代:1982

数据来源: WILEY

摘要:

AbstractExamples are given for three main processes determining the reactions in plasma etching:iThe interaction between plasma particles and the surfaces of solids;iiThe conversion of the gas composition in the plasma;iiiThe transport phenomena of reaction products in the reactor and the vacuum system.In the glow discharge the behaviour of saturated and unsaturated perfluorocarbon gases is very similar. Both classes of compounds are converted in a few seconds in the homologous series of perfluoroalcanes up to products of high molecular weight. The main products are CF4, C2F6, C3F8. Unsaturated compounds lead to the deposition of thin polymer films on the walls and the electrodes, whereas saturated ones are only capable of producing films on the surface of the reaction vessel. The deposition results from the recombination of free radicals arising from the plasma interactions in the gas and at the surfaces. Vice versa sputtering of polymer fragments acts on the gas composition in the plasma. Conversion processes are controled by current density and gas pressure. The cathode fall region of the discharge is found to be the zone of the highest reaction activity.

ISSN:0005-8025    

DOI:10.1002/ctpp.19820220208

出版商:WILEY‐VCH Verlag    

年代:1982

数据来源: WILEY

ISSN:0005-8025    

DOI:10.1002/ctpp.19820220201

出版商:WILEY‐VCH Verlag    

年代:1982

数据来源: WILEY