摘要:

Auger electron spectra of second row transition metals (Ag, Cd, In, Mo, Nb, Pd, Rh, Ru, Sb, Sn, Y, and Zr) are presented. The data were taken under identical conditions (10 keV, 1μA) in both derivative and direct (using beam brightness modulation) data collection modes.

ISSN:1055-5269    

DOI:10.1116/1.1247764

出版商:American Vacuum Society    

年代:1994

数据来源: AIP

摘要:

AES spectra were obtained from elements of the second row of the transition metals using a Perkin Elmer PHI 660 Scanning Auger Microprobe. Auger spectra were taken from Ag, Cd, In, Mo, Nb, Pd, Rh, Sb, Sn, Y, Zr, and Ru samples under identical conditions. Each elemental spectrum was obtained with electron beam energies of 3, 5, 10, and 20 keV using a 1μA beam current. These parameters yield spectra which could easily be obtained under normal operating conditions (for comparison). These conditions are easily obtained by other instruments. The Cu sample was also used to obtain data used in calculating the signal-to-noise ratio. The ratio was obtained using the primary CuKLLpeak located at 919 eV. The instrumental energy resolution used for all of these measurements was 0.61% ± 0.008% measured with a 3 keV backscattered peak.

ISSN:1055-5269    

DOI:10.1116/1.1247765

出版商:American Vacuum Society    

年代:1994

数据来源: AIP

摘要:

Elemental manganese has been studied by x-ray photoelectron spectroscopy. MgKαand ZrLαradiations were used as excitation sources for the study. In the literature a range of values has been reported for Mn core levels using Mg radiation. The purpose of this study is to provide spectral data obtained using Zr x-ray source in comparison with that obtained using Mg source. Such a data set will serve as a source of additional valuable information for enhancing the capability of x-ray photoelectron spectroscopy for investigating different specimens containing Mn. The XPS data in the 2pand 3pregions are presented. Significant differences are observed in the two sets of data. The data obtained using Zr source show considerable broadening of the core level spectra of Mn.

ISSN:1055-5269    

DOI:10.1116/1.1247766

出版商:American Vacuum Society    

年代:1994

数据来源: AIP

摘要:

X-ray photoemission spectra for the Si-terminated face of single crystal 6H-SiC(0001) are reported. The specimen was cut from a commercial (CREE Research) 1-in.,n-doped wafer. SiC has recently attracted attention in semiconductor applications requiring high temperature, high frequency, and high power operation. A companion submission shows AES spectra.

ISSN:1055-5269    

DOI:10.1116/1.1247767

出版商:American Vacuum Society    

年代:1994

数据来源: AIP

摘要:

We report Auger spectra for the Si-terminated face of single crystal 6H-SiC(0001). The specimen was cut from a commercial (CREE Research) 1-in.,n-doped wafer. SiC has recently attracted attention in semiconductor applications, and provides an attractive choice of material for devices operating at high temperature, high frequency, and high power. A companion submission shows XPS spectra.

ISSN:1055-5269    

DOI:10.1116/1.1247768

出版商:American Vacuum Society    

年代:1994

数据来源: AIP