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Observation of Fresnel fringes in the conventional scanning electron microscope

 

作者: A.N. Broers,  

 

期刊: Applied Physics Letters  （AIP Available online 1972）
卷期: Volume 21, issue 10  

页码: 499-501

 

ISSN:0003-6951

 

年代: 1972

 

DOI:10.1063/1.1654234

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Images of Fresnel fringes have been obtained in the conventional surface scanning electron microscope operating in the transmission mode. These fringes provide a means for critically evaluating instrument resolution, final lens astigmatism, and source brightness.

 

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