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Calculation of sputtering of sequentially increasing atom blocks

 

作者: V.A. Eltekov,   O.A. Popova,   V.E. Yurasova,  

 

期刊: Radiation Effects  （Taylor Available online 1984）
卷期: Volume 83, issue 1-2  

页码: 39-67

 

ISSN:0033-7579

 

年代: 1984

 

DOI:10.1080/00337578408215789

 

出版商: Taylor & Francis Group

 

数据来源: Taylor

 

摘要:

Some simplified models are used to computer-calculate the parameters of Cu single crystal sputtering by 1 keV Ar ions. Each of the models is a confined structure of a perfect single crystal with various numbers of atoms (from 2 to 34). The sputtering yields, the energy spectra and spatial distributions of sputtered atoms are calculated at various energies of bombarding ions.

 

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