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Microwave multipolar plasmas excited by distributed electron cyclotron resonance: Concept and performance

 

作者: M. Pichot,   A. Durandet,   J. Pelletier,   Y. Arnal,   L. Vallier,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1988)
卷期: Volume 59, issue 7  

页码: 1072-1075

 

ISSN:0034-6748

 

年代: 1988

 

DOI:10.1063/1.1139728

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Distributed electron cyclotron resonance or DECR, a new plasma excitation technique well adapted to microwave multipolar plasmas, is described. The novel reactor concept is based upon the use of several microwave linear applicators working at the ECR mode along the multipolar confinement magnets. At a microwave frequency of 2.45 GHz, large volumes of highly homogeneous plasmas with an electron temperature of the order of 3 eV and ion densities better than 1011cm−3are currently being produced in DECR reactors.

 

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