Microwave multipolar plasmas excited by distributed electron cyclotron resonance: Concept and performance
作者:
M. Pichot,
A. Durandet,
J. Pelletier,
Y. Arnal,
L. Vallier,
期刊:
Review of Scientific Instruments
(AIP Available online 1988)
卷期:
Volume 59,
issue 7
页码: 1072-1075
ISSN:0034-6748
年代: 1988
DOI:10.1063/1.1139728
出版商: AIP
数据来源: AIP
摘要:
Distributed electron cyclotron resonance or DECR, a new plasma excitation technique well adapted to microwave multipolar plasmas, is described. The novel reactor concept is based upon the use of several microwave linear applicators working at the ECR mode along the multipolar confinement magnets. At a microwave frequency of 2.45 GHz, large volumes of highly homogeneous plasmas with an electron temperature of the order of 3 eV and ion densities better than 1011cm−3are currently being produced in DECR reactors.
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