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Integrated circuits as viewed with an acoustic microscope

 

作者: R. A. Lemons,   C. F. Quate,  

 

期刊: Applied Physics Letters  (AIP Available online 1974)
卷期: Volume 25, issue 5  

页码: 251-253

 

ISSN:0003-6951

 

年代: 1974

 

DOI:10.1063/1.1655459

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The images of a high‐frequency bipolar transistor obtained with an acoustic microscope are compared with those of a differential interference optical microscope and a scanning electron microscope in order to illustrate that the acoustic microscope can be used in a reflection‐type mode to obtain quality pictures of a surface containing integrated circuits. The frequency of the acoustic beam is 600 MHz and the resolution is near 2 &mgr;.

 

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