Integrated circuits as viewed with an acoustic microscope
作者:
R. A. Lemons,
C. F. Quate,
期刊:
Applied Physics Letters
(AIP Available online 1974)
卷期:
Volume 25,
issue 5
页码: 251-253
ISSN:0003-6951
年代: 1974
DOI:10.1063/1.1655459
出版商: AIP
数据来源: AIP
摘要:
The images of a high‐frequency bipolar transistor obtained with an acoustic microscope are compared with those of a differential interference optical microscope and a scanning electron microscope in order to illustrate that the acoustic microscope can be used in a reflection‐type mode to obtain quality pictures of a surface containing integrated circuits. The frequency of the acoustic beam is 600 MHz and the resolution is near 2 &mgr;.
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