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Performance and characteristics of an OMVPE reactor for solar cell materials

 

作者: P. B. Chinoy,   I. B. Bhat,   J. M. Borrego,   S. K. Ghandhi,  

 

期刊: AIP Conference Proceedings  (AIP Available online 1992)
卷期: Volume 268, issue 1  

页码: 292-297

 

ISSN:0094-243X

 

年代: 1992

 

DOI:10.1063/1.42879

 

出版商: AIP

 

数据来源: AIP

 

摘要:

This paper summarizes the behavior of a novel inverted reactor, designed to grow large area solar cell material with a high efficiency of chemical utilization. A computer model for this reactor, based on equations for the conservation of mass, momentum, energy, and species, has been used for predicting its operating characteristics. Both the reactor parameters, as well as the properties of doped and undoped GaAs grown in this system, are outlined in this paper.

 

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