The operation of XeF* and KrF* waveguide lasers excited by a capacitively coupled self‐sustained discharge is described. Output energies of 35 and 50 &mgr;J, peak powers of 3.5 and 15 kW, and FWHM pulse widths of 10 and 3 nsec have been obtained for XeF* and KrF*, respectively, with an intrinsic efficiency of 1%. Double‐pulse experiments were conducted to evaluate the repetition rate potential of this device.