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Characterisation of ion-implanted layers for GAAS FETs

 

作者: M.Bujatti,   F.Marcelja,  

 

期刊: IEE Proceedings I (Solid-State and Electron Devices)  (IET Available online 1981)
卷期: Volume 128, issue 3  

页码: 97-100

 

年代: 1981

 

DOI:10.1049/ip-i-1.1981.0028

 

出版商: IEE

 

数据来源: IET

 

摘要:

The problem of measuring very steep doping profiles, of the type usually present in ion-implanted GaAs FETs, is critically examined in the light of numerical solutions of the Poisson equation for some typical layers. It is found that the most popular techniques (C/V and saturation-current measurements) may be quite misleading or, at least, appreciable corrections are typically required.

 

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