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Transport optics for a space‐charge broadening ion beam

 

作者: Geoffrey P. Malafsky,   Nicholas Winograd,  

 

期刊: Review of Scientific Instruments  (AIP Available online 1988)
卷期: Volume 59, issue 8  

页码: 1294-1302

 

ISSN:0034-6748

 

年代: 1988

 

DOI:10.1063/1.1139712

 

出版商: AIP

 

数据来源: AIP

 

摘要:

The design and performance of a low‐energy ion gun system suitable for surface analysis is described. The ion gun system is capable of delivering up to a 0.72 &mgr;A beam of Ar+ions at a potential of 500 eV into a spot diameter of 1 mm. This performance is accomplished by using ion optics to refocus the space‐charge diverging beam along the 44‐cm path to the target. The ion optics have been optimized by the use of a new simulation program,chden, which can model a series of lenses and the effects of space‐charge forces.

 

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