Transport optics for a space‐charge broadening ion beam
作者:
Geoffrey P. Malafsky,
Nicholas Winograd,
期刊:
Review of Scientific Instruments
(AIP Available online 1988)
卷期:
Volume 59,
issue 8
页码: 1294-1302
ISSN:0034-6748
年代: 1988
DOI:10.1063/1.1139712
出版商: AIP
数据来源: AIP
摘要:
The design and performance of a low‐energy ion gun system suitable for surface analysis is described. The ion gun system is capable of delivering up to a 0.72 &mgr;A beam of Ar+ions at a potential of 500 eV into a spot diameter of 1 mm. This performance is accomplished by using ion optics to refocus the space‐charge diverging beam along the 44‐cm path to the target. The ion optics have been optimized by the use of a new simulation program,chden, which can model a series of lenses and the effects of space‐charge forces.
点击下载:
PDF
(774KB)
返 回