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Spectroscopic Measurements of Plasma Temperatures in a Radio Frequency Discharge

 

作者: Z. Tomasik,   W. żyrnicki,  

 

期刊: Spectroscopy Letters  （Taylor Available online 1986）
卷期: Volume 19, issue 2  

页码: 179-190

 

ISSN:0038-7010

 

年代: 1986

 

DOI:10.1080/00387018608069230

 

出版商: Taylor & Francis Group

 

关键词: plasma temperature;excitation temperature;vibrational temperature;rotational temperature;radio frequency discharge

 

数据来源: Taylor

 

摘要:

Argon and mixtures of argon with CH4, C2H2and N2have been excited in a 27.2 MHz radio frequency discharge at pressures of 10 and 5 Torr. Plasma spectra have been recorded and analyzed. The excitation temperatures of Ar I and H, the C2and CN vibrational temperatures and the N2and CN rotational temperatures have been determined and discussed.

 

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