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Kikuchi correlations in Auger electron spectroscopy

 

作者: T.W. Rusch,   J.P. Bertino,   W.P. Ellis,  

 

期刊: Applied Physics Letters  (AIP Available online 1973)
卷期: Volume 23, issue 7  

页码: 359-360

 

ISSN:0003-6951

 

年代: 1973

 

DOI:10.1063/1.1654918

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Variations in Auger electron signal intensities with changing primary electron angle of incidence have been correlated with the Kikuchi display from a Si (111) surface. From this correlation a qualitative depth distribution of the carbon contaminant is inferred.

 

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