Kikuchi correlations in Auger electron spectroscopy
作者:
T.W. Rusch,
J.P. Bertino,
W.P. Ellis,
期刊:
Applied Physics Letters
(AIP Available online 1973)
卷期:
Volume 23,
issue 7
页码: 359-360
ISSN:0003-6951
年代: 1973
DOI:10.1063/1.1654918
出版商: AIP
数据来源: AIP
摘要:
Variations in Auger electron signal intensities with changing primary electron angle of incidence have been correlated with the Kikuchi display from a Si (111) surface. From this correlation a qualitative depth distribution of the carbon contaminant is inferred.
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