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Spin Cast Poly(t-butyl methacrylate) Film on Glass Substrate by XPS

 

作者: Michael Ackeret,   Buddy D. Ratner,  

 

期刊: Surface Science Spectra  （AIP Available online 1992）
卷期: Volume 1, issue 1  

页码: 104-107

 

ISSN:1055-5269

 

年代: 1992

 

DOI:10.1116/1.1247679

 

出版商: American Vacuum Society

 

关键词: POLYMERS;THIN FILMS;AMORPHOUS STATE;SPIN−ON COATINGS;METHACRYLATES;PHOTOELECTRON SPECTROSCOPY;X RADIATION;CASTING;CHEMICAL COMPOSITION

 

数据来源: AIP

 

摘要:

X-ray photoelectron spectroscopy was used to analyze poly(t-butyl methacrylate), a pure spin cast polymer. This polymer was centrifugally spun cast onto a glass substrate and stored in an UV/ozone cleaned,O-ring sealed aluminum container. The polymer was examined at three different electron takeoff angles to verify homogeneity. Data were collected and atomic compositions calculated with a Hewlett-Packard 5950B ESCA. Measured atomic composition percentages closely matched the expected stoichiometry of the polymer.

 

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