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Schottky‐barrier height of iridium silicide

 

作者: I. Ohdomari,   K. N. Tu,   F. M. d’Heurle,   T. S. Kuan,   S. Petersson,  

 

期刊: Applied Physics Letters  (AIP Available online 1978)
卷期: Volume 33, issue 12  

页码: 1028-1030

 

ISSN:0003-6951

 

年代: 1978

 

DOI:10.1063/1.90256

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Iridium silicides have been prepared by annealing Ir films on (100) ‐ and (111) ‐oriented Si from 300 to 500 °C. Phase identification was performed by both x‐ray and electron diffractions, and Schottky‐barrier height by current‐voltage measurements. The silicide IrSi has been found to have a barrier height of 0.93 eV, which is the highest among all the silicides measured. The high value leads us to conclude that the silicide does not follow the linear relation which exists between barrier height and heat of formation of most other silicides.

 

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