Motivated by an application in semiconductor manufacturing, we study the problem of minimizing total tardiness on a batch processing machine with incompatibl8e job families, where all jobs of the same family have identical processing times and jobs of different families cannot be processed together. We present a dynamic programming algorithm which has polynomial time complexity when the number of job families and the batch machine capacity are fixed. We also examine various heuristic solution procedures which can provide near optimal solutions in a reasonable amount of computation time.