Time‐resolved x‐ray diffraction measurement of the temperature and temperature gradients in silicon during pulsed laser annealing
作者:
B. C. Larson,
C. W. White,
T. S. Noggle,
J. F. Barhorst,
D. M. Mills,
期刊:
Applied Physics Letters
(AIP Available online 1983)
卷期:
Volume 42,
issue 3
页码: 282-284
ISSN:0003-6951
年代: 1983
DOI:10.1063/1.93880
出版商: AIP
数据来源: AIP
摘要:
Nanosecond resolution time‐resolved x‐ray diffraction measurements have been used to study the temperature and temperature gradients in 〈100〉 and 〈111〉 oriented silicon crsytals during pulsed laser annealing. Thermal strain analysis of time‐resolved extended Bragg scattering has shown the lattice temperature to reach the melting point during 15‐ns, 1.5‐J/cm2ruby laser pulses and to remain at the melting point during the high reflectivity phase (HRP). The temperature gradients at the liquid‐solid interface were found to be in the range of ∼107K/cm during the HRP.
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