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Trap‐controlled hydrogen diffusion and the mechanism of light‐enhanced diffusion ina‐Si:H

 

作者: Howard M. Branz,   Sally E. Asher,   Brent P. Nelson,  

 

期刊: AIP Conference Proceedings  （AIP Available online 1992）
卷期: Volume 268, issue 1  

页码: 138-139

 

ISSN:0094-243X

 

年代: 1992

 

DOI:10.1063/1.42929

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We review our recent high‐depth‐resolution secondary ion mass spectrometry studies of hydrogen diffusion in amorphous silicon. We describe the trap‐controlled H diffusion model supported by the experiments. Recent results on light enhancement of H diffusion ina‐Si:H are also discussed.

 

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