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The location of substitutional foreign atoms in GaAs by asymmetry of backscattering yield near

 

作者: J.U. Andersen,   N.G. Chechenin,   Yu.A. Timoshnikov,   Z.H. Zhang,  

 

期刊: Radiation Effects  (Taylor Available online 1984)
卷期: Volume 83, issue 1-2  

页码: 91-97

 

ISSN:0033-7579

 

年代: 1984

 

DOI:10.1080/00337578408215792

 

出版商: Taylor & Francis Group

 

数据来源: Taylor

 

摘要:

A new technique is applied to determine the sites of implanted substitutional impurities in GaAs. Since theZvalues are nearly equal, Ga and As substitutions cannot be distinguished from a measurement of the width of channeling dips, but the asymmetry of a <110> scan in the {110} plane is opposite for backscattering from the two types of atoms, and a comparison with the observed asymmetry for backscattering from the impurity determines the site. As expected, In is found to replace Ga and Sb to replace As. In addition, the preferential site of implanted Sn atoms is shown to be a Ga site. These results confirm earlier assignments based on isomer shifts in Mössbauer experiments.

 

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