We have shown single‐mode surface optical waveguiding in lithium‐ion‐implanted fused quartz, and multimode buried waveguiding in argon‐ and lithium‐ion‐implanted fused quartz. Guide losses are observed to be of the order of 5 dB for the samples investigated for both species of ions. Described in this letter are the experimental procedures and parameters for ion implantation and the measurements for mode behavior as compared to theoretical models.