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Orientation filtering by growth‐velocity competition in zone‐melting recrystallization of silicon on SiO2

 

作者: H. A. Atwater,   C. V. Thompson,   Henry I. Smith,   M. W. Geis,  

 

期刊: Applied Physics Letters  (AIP Available online 1983)
卷期: Volume 43, issue 12  

页码: 1126-1128

 

ISSN:0003-6951

 

年代: 1983

 

DOI:10.1063/1.94255

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We describe a method of controlling the in‐plane ⟨100⟩ directions of grains in (100)‐textured silicon films produced by zone‐melting recrystallization over amorphous SiO2. Grains having in‐plane orientation within a narrow range are able to grow through an orientation filter consisting of a pattern of crystallization barriers, while grains having other orientations are occluded. The results of experiments using an orientation filter, and the parameters which optimize filter performance, are reported.

 

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