Orientation filtering by growth‐velocity competition in zone‐melting recrystallization of silicon on SiO2
作者:
H. A. Atwater,
C. V. Thompson,
Henry I. Smith,
M. W. Geis,
期刊:
Applied Physics Letters
(AIP Available online 1983)
卷期:
Volume 43,
issue 12
页码: 1126-1128
ISSN:0003-6951
年代: 1983
DOI:10.1063/1.94255
出版商: AIP
数据来源: AIP
摘要:
We describe a method of controlling the in‐plane 〈100〉 directions of grains in (100)‐textured silicon films produced by zone‐melting recrystallization over amorphous SiO2. Grains having in‐plane orientation within a narrow range are able to grow through an orientation filter consisting of a pattern of crystallization barriers, while grains having other orientations are occluded. The results of experiments using an orientation filter, and the parameters which optimize filter performance, are reported.
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