This paper illustrates the progress of semiconductor device development during the 1960s by reference to various families of active devices (excluding opto-devices).The reasons for the change during that period from germanium to silicon technology are discussed, and the enormous influence of the silicon planar technique on device design and manufacturing methods is shown. The increasing role of the silicon integrated circuit is described, and the reasons why the integrated circuit, both bipolar and m.o.s. will continue to form the basis of future equipment design are explained.