Laser sintering of VO2film
作者:
Tomokuni Mitsuishi,
Katsuya Okabe,
Yoshisato Sasaki,
期刊:
Applied Physics Letters
(AIP Available online 1982)
卷期:
Volume 40,
issue 1
页码: 89-90
ISSN:0003-6951
年代: 1982
DOI:10.1063/1.92899
出版商: AIP
数据来源: AIP
摘要:
The conventional preparation process of VO2temperature sensors requires the precise control of ambient atmosphere. This is one of the difficulties in their application to integrated devices. Laser sintering proved to be useful in overcoming this difficulty. Specimens of VO2film (1.4×1.4×0.04 mm3in size) printed on alumina substrates changed in electrical resistance by a factor of 102at about 68 °C with increasing temperature, after exposing them, in open air, to a 2‐ms pulse beam from a ruby laser on relaxation oscillation, whose energy density was 6.5 J/cm2.
点击下载:
PDF
(143KB)
返 回