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X‐ray‐preionized high‐pressure KrF laser

 

作者: Shin Sumida,   Minoru Obara,   Tomoo Fujioka,  

 

期刊: Applied Physics Letters  （AIP Available online 1978）
卷期: Volume 33, issue 11  

页码: 913-915

 

ISSN:0003-6951

 

年代: 1978

 

DOI:10.1063/1.90242

 

出版商: AIP

 

数据来源: AIP

 

摘要:

As a novel alternative to existing means of preionization, we have used x radiation to preionize a high‐pressure KrF laser mixture and found that the x‐ray preionization produces a uniform glow discharge for high‐pressure KrF laser gas.

 

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