Spark Source Mass Spectrographic Analysis of Gallium Arsenide for Trace Oxygen and Carbon Using Liquid Helium Cryopumping
作者:
D.C. Walters,
D.C. Look,
T.O. Tiernan,
期刊:
Analytical Letters
(Taylor Available online 1983)
卷期:
Volume 16,
issue 17-18
页码: 1427-1434
ISSN:0003-2719
年代: 1983
DOI:10.1080/00032718308065255
出版商: Taylor & Francis Group
数据来源: Taylor
摘要:
A spark source mass spectrometric system has been developed for trace levels of oxygen and carbon in gallium arsenide using liquid helium cryopumping of the source chamber. Following bake-out, a collector positioned inside the source chamber is cooled using a controlled flow of liquid helium. Residual back-ground gases are more effectively removed than with liquid nitrogen and detectabilities of 0.02 ppma for oxygen and 0.05 ppma for carbon have been obtained. Routine analyses are carried out with a moderate consumption of liquid helium.
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