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Doping of sputtered amorphous-silicon solar cells

 

作者: M.J.Thompson,   J.Allison,   M.M.Alkaisi,  

 

期刊: IEE Journal on Solid-State and Electron Devices  (IET Available online 1978)
卷期: Volume 2, issue 3S  

页码: 11-14

 

年代: 1978

 

DOI:10.1049/ij-ssed.1978.0025

 

出版商: IEE

 

数据来源: IET

 

摘要:

The paper describes the progress that has so far been made in the sputtering of amorphous silicon for solar-cell applications. An alternative form of doping to doping from the gas phase is described. The results obtained are compared with those found for glow-discharge silicon. Finally, a discussion of the relative advantages of sputtering techniques emphasises their considerable potential for commercial exploitation in the production of thin-film solar cells.

 

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