Doping of sputtered amorphous-silicon solar cells
作者:
M.J.Thompson,
J.Allison,
M.M.Alkaisi,
期刊:
IEE Journal on Solid-State and Electron Devices
(IET Available online 1978)
卷期:
Volume 2,
issue 3S
页码: 11-14
年代: 1978
DOI:10.1049/ij-ssed.1978.0025
出版商: IEE
数据来源: IET
摘要:
The paper describes the progress that has so far been made in the sputtering of amorphous silicon for solar-cell applications. An alternative form of doping to doping from the gas phase is described. The results obtained are compared with those found for glow-discharge silicon. Finally, a discussion of the relative advantages of sputtering techniques emphasises their considerable potential for commercial exploitation in the production of thin-film solar cells.
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