Scanning X‐Ray Emission Microscopy
作者:
H. J. Leamy,
S. D. Ferris,
期刊:
Applied Physics Letters
(AIP Available online 1972)
卷期:
Volume 20,
issue 3
页码: 115-116
ISSN:0003-6951
年代: 1972
DOI:10.1063/1.1654070
出版商: AIP
数据来源: AIP
摘要:
This letter describes the production of continuous tone micrographs from the x radiation emitted by a specimen subjected to electron bombardment in a scanning electron microscope. The x rays are collected and energy analyzed with an energy‐dispersive spectrometer so that topographically rough specimens may be examined. The images reveal variations in specimen topography and composition.
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