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Scanning X‐Ray Emission Microscopy

 

作者: H. J. Leamy,   S. D. Ferris,  

 

期刊: Applied Physics Letters  (AIP Available online 1972)
卷期: Volume 20, issue 3  

页码: 115-116

 

ISSN:0003-6951

 

年代: 1972

 

DOI:10.1063/1.1654070

 

出版商: AIP

 

数据来源: AIP

 

摘要:

This letter describes the production of continuous tone micrographs from the x radiation emitted by a specimen subjected to electron bombardment in a scanning electron microscope. The x rays are collected and energy analyzed with an energy‐dispersive spectrometer so that topographically rough specimens may be examined. The images reveal variations in specimen topography and composition.

 

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