Innovative deposition techniques for the fabrication of polycrystalline thin‐film photovoltaics
作者:
J. H. Armstrong,
B. R. Lanning,
M. S. Misra,
期刊:
AIP Conference Proceedings
(AIP Available online 1992)
卷期:
Volume 268,
issue 1
页码: 177-185
ISSN:0094-243X
年代: 1992
DOI:10.1063/1.42911
出版商: AIP
数据来源: AIP
摘要:
A key issue for photovoltaics (PV), both in terrestrial and future space applications, isproducibility, particularly for applications utilizing a large volume of PV. Among the concerns for fabrication of polycrystalline thin‐film photovoltaics, such as copper‐indium‐diselenide (CIS) and cadmium‐telluride (CdTe), are production volume, which translates directly related to cost, and minimization of waste. Both the rotating cylindrical magnetron (C‐MagTM) and pulsed electrodeposition have tremendous potential for the fabrication of polycrystalline thin‐film photovoltaics due to scaleability, efficient utilization of source materials and inherently higher deposition rates. In the case of sputtering, the unique geometry of the C‐MagTMfacilitates innovative cosputtering and reactive sputtering that could lead to greater throughput, reduced health and safety risks, and ultimately lower fabrication cost. For pulsed electrodeposition, the films appear to be more tightly adherent and deposited at an enhanced rate when compared to conventional DC electrodeposition. This paper addresses Martin Marietta’s investigation into innovative sputtering techniques and pulsed electrodeposition with a near‐term goal of 930 cm2(1 ft2) monolithically‐integrated CIS and CdTe submodules.
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