AbstractDevelopment of the nozzle separation process for enrichment of uranium. In the nozzle separation process an enrichment of235U is achieved by extremely high centrifugal forces in a curved flow of UF6diluted with a light gas. In Brazil a cascade section consisting of 24 nozzle separation stages has been constructed and has been in operation since late 1985. To produce nozzle separation systems with extremely small characteristic dimensions permitting plant operation at atmospheric pressure, a manufacturing process has been developed which relies on combined X‐ray lithography and microgalvanic deposition (LIGA‐technology). Using this technology the prototype separation stages constructed at the Karlsruhe Nuclear Research Center enable commercial nozzle separation plants with capacities of up to 3 Mio. SWU/year to be reali