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Melt dynamics of silicon‐on‐sapphire during pulsed laser annealing

 

作者: Michael O. Thompson,   G. J. Galvin,   J. W. Mayer,   P. S. Peercy,   R. B. Hammond,  

 

期刊: Applied Physics Letters  (AIP Available online 1983)
卷期: Volume 42, issue 5  

页码: 445-447

 

ISSN:0003-6951

 

年代: 1983

 

DOI:10.1063/1.93965

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Transient electrical conductance measurements have been made on 0.45‐&mgr;m silicon‐on‐sapphire during pulsed laser annealing with 25‐ns ruby irradiation. The photoconductive contribution to the transient current was sufficiently small that the entire melt and resolidification process could be directly observed. The technique yields quantitative measures of melt depths, melting velocities (5–13 m/s), and solidification velocities (2.8–3.3 m/s). Combined with the complementary techniques of time‐resolved reflectivity, energy transmission, and calorimetric energy absorption, transient conductance provides a powerful new diagnostic for investigating melt dynamics.

 

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