Mesoscopic physics encompasses a group of ‘‘new’’ phenomena observable in sufficiently small electronic systems. In describing the phenomena one may simply say that the systems are beginning to behave like atoms or molecules rather than bulk systems because of the small system or element size. One looks forward to an electronics based on these phenomena but the effects implementation would be favored by device scale at the level of only a few nanometer. It is of interest therefore whether such size scales are attainable using lithographic means similar at least in principle to those in making ordinary electronic circuits.