AbstractDevelopments in the instrumentation of total reflection x‐ray fluorescence analysis (TXRF) are presented. Different ways of obtaining optimized primary radiation are discussed, and a new double reflector‐collimator is introduced. To increase the number of detectable elements, special devices for low‐Zand high‐Zdeterminations are presented, in addition to a modular TXRF attachment for versatile applications. Detection limits achieved by various types of excitation conditions are given. TXRF has been shown to be a powerful analytical tool for trace element determinations in various