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A new method for determining thin‐film refractive index and thickness using guided optical waves

 

作者: John S. Wei,   W. D. Westwood,  

 

期刊: Applied Physics Letters  (AIP Available online 1978)
卷期: Volume 32, issue 12  

页码: 819-821

 

ISSN:0003-6951

 

年代: 1978

 

DOI:10.1063/1.89928

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We have developed a new method for determining thin‐film refractive index and thickness. In this technique, a sharply converging laser beam is coupled into the film by a prism. Dark mode lines characteristic of the waveguide structure are observed in reflection independently of absorption or scattering loss in the film. A particularly promising application is the rapid sampling of dielectric films in semiconductor technology.

 

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