A new method for determining thin‐film refractive index and thickness using guided optical waves
作者:
John S. Wei,
W. D. Westwood,
期刊:
Applied Physics Letters
(AIP Available online 1978)
卷期:
Volume 32,
issue 12
页码: 819-821
ISSN:0003-6951
年代: 1978
DOI:10.1063/1.89928
出版商: AIP
数据来源: AIP
摘要:
We have developed a new method for determining thin‐film refractive index and thickness. In this technique, a sharply converging laser beam is coupled into the film by a prism. Dark mode lines characteristic of the waveguide structure are observed in reflection independently of absorption or scattering loss in the film. A particularly promising application is the rapid sampling of dielectric films in semiconductor technology.
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