Picosecond, tunable ArF* excimer laser source
作者:
H. Egger,
T. S. Luk,
K. Boyer,
D. F. Muller,
H. Pummer,
T. Srinivasan,
C. K. Rhodes,
期刊:
Applied Physics Letters
(AIP Available online 1982)
卷期:
Volume 41,
issue 11
页码: 1032-1034
ISSN:0003-6951
年代: 1982
DOI:10.1063/1.93383
出版商: AIP
数据来源: AIP
摘要:
A 40‐mJ ArF* laser with pulse duration ∼10 ps and spatial and spectral properties close to the transform limits is described. Substantial extraction of the available energy from the final amplifier is demonstrated, a fact providing direct evidence against the presence of significant nonlinear losses in the amplifying medium up to an intensity of ∼1 GW/cm.2
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