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Q‐switched ruby laser alloying of Ohmic contacts on gallium arsenide epilayers

 

作者: Shlomo Margalit,   Dan Fekete,   David M. Pepper,   Chien‐Ping Lee,   Amnon Yariv,  

 

期刊: Applied Physics Letters  (AIP Available online 1978)
卷期: Volume 33, issue 4  

页码: 346-347

 

ISSN:0003-6951

 

年代: 1978

 

DOI:10.1063/1.90331

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Ohmic contacts of AuGe have been produced on GaAs epilayers by laser alloying. The contacts possess morphological and electrical properties which are superior to those formed by conventional alloying.

 

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