Q‐switched ruby laser alloying of Ohmic contacts on gallium arsenide epilayers
作者:
Shlomo Margalit,
Dan Fekete,
David M. Pepper,
Chien‐Ping Lee,
Amnon Yariv,
期刊:
Applied Physics Letters
(AIP Available online 1978)
卷期:
Volume 33,
issue 4
页码: 346-347
ISSN:0003-6951
年代: 1978
DOI:10.1063/1.90331
出版商: AIP
数据来源: AIP
摘要:
Ohmic contacts of AuGe have been produced on GaAs epilayers by laser alloying. The contacts possess morphological and electrical properties which are superior to those formed by conventional alloying.
点击下载:
PDF
(166KB)
返 回