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Optical waveguiding in proton‐implanted GaAs

 

作者: E. Garmire,   H. Stoll,   A. Yariv,   R.G. Hunsperger,  

 

期刊: Applied Physics Letters  （AIP Available online 1972）
卷期: Volume 21, issue 3  

页码: 87-88

 

ISSN:0003-6951

 

年代: 1972

 

DOI:10.1063/1.1654301

 

出版商: AIP

 

数据来源: AIP

 

摘要:

We have produced optical waveguides inn‐type GaAs by implantation with 300‐keV protons. The guiding is shown to be due to the elimination of charge carriers from the implanted region. Annealing of the waveguide leads to very large reductions in the 1.15‐&mgr; guided‐wave absorption.

 

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