Growth of CdTe films on sapphire by molecular beam epitaxy
作者:
T. H. Myers,
Yawcheng Lo,
R. N. Bicknell,
J. F. Schetzina,
期刊:
Applied Physics Letters
(AIP Available online 1983)
卷期:
Volume 42,
issue 3
页码: 247-248
ISSN:0003-6951
年代: 1983
DOI:10.1063/1.93903
出版商: AIP
数据来源: AIP
摘要:
Results of initial attempts to grow cubic‐phase CdTe films on sapphire by molecular beam epitaxy are reported. Depositions have been completed on (11¯02)R‐plane, (12¯10)A‐plane, and (0001) basal plane substrates. Substrate temperatures in the range 260–350 °C were employed along with deposition rates of 1.5–7.5 A˚/s. Depositions on (11¯02) sapphire generally produced films containing some elements of the hexagonal phase, as disclosed by x‐ray diffraction and UV reflectance measurements. Sharp cubic‐phase epitaxy was obtained for thick (∼5 &mgr;m) CdTe films grown on (12¯10) and (0001) sapphire substrates. The epitaxial films are smooth and mirrorlike in appearance. Nomarski micrographs show a featureless CdTe surface.
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