Investigation of the silicon beading phenomena during zone‐melting recrystallization
作者:
Z. A. Weinberg,
V. R. Deline,
T. O. Sedgwick,
S. A. Cohen,
C. F. Aliotta,
G. J. Clark,
W. A. Lanford,
期刊:
Applied Physics Letters
(AIP Available online 1983)
卷期:
Volume 43,
issue 12
页码: 1105-1107
ISSN:0003-6951
年代: 1983
DOI:10.1063/1.94242
出版商: AIP
数据来源: AIP
摘要:
During recrystallization of encapsulated silicon films on SiO2, by the graphite strip heater technique, the silicon sometimes breaks apart and agglomerates into small beads or stripes. By secondary ion mass spectroscopy analysis, it was found that a high concentration of nitrogen at the interface between the silicon and the top SiO2capping layer is needed to prevent this from occurring. Incorporation of hydrogen into the crystallization ambient was found to cause the beading to occur. The initial stages of the bead formation were investigated by scanning electron cross‐section microscopy.
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