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Hard carbon coatings with low optical absorption

 

作者: B. Dischler,   A. Bubenzer,   P. Koidl,  

 

期刊: Applied Physics Letters  (AIP Available online 1983)
卷期: Volume 42, issue 8  

页码: 636-638

 

ISSN:0003-6951

 

年代: 1983

 

DOI:10.1063/1.94056

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Hydrogenated amorphous (a‐C:H) films were prepared by rf‐plasma deposition from benzene vapor. Complete optical absorption spectra from the UV to the IR (0.2–20.0 &mgr;m) have been measured. The optical gap depends linearly on hydrogen content andEoptcan be varied between 0.8 and 1.8 eV. For energies belowEoptthe films are almost transparent and absorption is especially low in the 2–6‐&mgr;m region (e.g., &agr;=15 cm−1at &lgr;=2.8 &mgr;m). Sharp C–H stretch absorption bands occur near 3.4 &mgr;m, giving insight into the microstructure of the films. A newly reported weak band at 3.03 &mgr;m is first evidence for C–C triple bonds (sp1hybridization) ina‐C:H, wheresp3(single) andsp2(double) C–C bonds dominate.

 

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