Characterization of ZnS grown by metal‐organic chemical vapour deposition on GaAs(100) using t‐butyl mercaptan and dimethylzinc
作者:
D. N. Armitage,
H. M. Yates,
J. O. Williams,
D. J. Cole‐hamilton,
I. L. J. Patterson,
期刊:
Advanced Materials for Optics and Electronics
(WILEY Available online 1992)
卷期:
Volume 1,
issue 1
页码: 43-46
ISSN:1057-9257
年代: 1992
DOI:10.1002/amo.860010108
出版商: John Wiley&Sons Ltd.
关键词: Zinc sulphide;MOCVD growth;t‐Butyl mercaptan;Dimethylzinc
数据来源: WILEY
摘要:
AbstractZnS has been grown on GaAs(100) substrates by atmospheric pressure metal–organic chemical vapour deposition (MOCVD) using dimethylzinc (DMZn) and t‐butyl mercaptan (t‐BuSH). The effects of the reactant gas phase molar ratio and the growth temperature on the characteristics of the material grown have been investigated. The structural quality of the layer is demonstrated by X‐ray rocking curve half‐widths of less than 300 arcsec for the epilayers. There is little significant pre‐reaction and the layers are of excellent surface morphology and layer
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