首页   按字顺浏览 期刊浏览 卷期浏览 On the theory of binary alloy sputtering by light ions
On the theory of binary alloy sputtering by light ions

 

作者: V.V. Pletnev,   D.S. Semenov,   V.G. Tel'Kovsky,  

 

期刊: Radiation Effects  （Taylor Available online 1984）
卷期: Volume 83, issue 1-2  

页码: 113-119

 

ISSN:0033-7579

 

年代: 1984

 

DOI:10.1080/00337578408215794

 

出版商: Taylor & Francis Group

 

数据来源: Taylor

 

摘要:

The theory of sputtering of multicomponent homogeneous constant composition materials is based on solution of the Boltzmann equation, taking into account the presence of the sputtered target plane surface and moving atom cascades anisotropy. Obtained results are accurate for both the regime of linear cascades and single-knock-on regime in the case of sputtering by light ions.

 

点击下载:  PDF (256KB)



返 回