Microfabrication using a Computer-Controlled Scanning Transmission
作者:
J. J. Kim,
H. G. Sampson,
T. E. Everhart,
期刊:
Journal of Vacuum Science and Technology
(AIP Available online 1973)
卷期:
Volume 10,
issue 6
页码: 1005-1007
ISSN:0022-5355
年代: 1973
DOI:10.1116/1.1318453
出版商: American Vacuum Society
数据来源: AIP
摘要:
Fabrication and inspection of two-dimensional lattice structures in thin polymer films have been carried out using a computer-controlled scanning electron microscope (CCSEM). Periods of 0.2 μ are quite regular, finer resolutions show some irregularities possibly due to film instabilities. Using the CCSEM permits great flexibility, and using thin films eliminates the problem of backscattered electrons from the substrate, which severely limits the resolution of periodic structures fabricated on a solid substrate. These structures should be useful in integrated optics, and may be used as x-ray lithography or evaporation masks.
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