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Growth of three‐dimensional dielectric waveguides for integrated optics by molecular‐beam‐epitaxy method

 

作者: A.Y. Cho,   F.K. Reinhart,  

 

期刊: Applied Physics Letters  （AIP Available online 1972）
卷期: Volume 21, issue 8  

页码: 355-356

 

ISSN:0003-6951

 

年代: 1972

 

DOI:10.1063/1.1654409

 

出版商: AIP

 

数据来源: AIP

 

摘要:

Experimental work was carried out to fabricate three‐dimensional waveguides for integrated optics by masking molecular beams during epitaxy of GaAs and AlxGa1−xAs. We report here some preliminary results of this new technique for fabricating dielectric waveguides.

 

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