Significantly improved output power and spectral characteristics have been obtained for an electron beam‐pumped XeF(C→A) laser by selective tailoring of kinetic processes. Using a high pressure Ar‐Xe mixture containing both NF3and F2in combination, a laser pulse energy density of 0.1 J/l was obtained corresponding to an electrical‐optical conversion efficiency of approximately 0.1%. Modeling of kinetic processes and analysis of laser spectral output confirm that the improved laser efficiency is primarily a consequence of reduced absorption by Xe‐related excited species.