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SAW resonators using rf‐sputtered ZnO films on glass substrates

 

作者: Shusuke Ono,   Osamu Yamazaki,   Kenzo Ohji,   Kiyotaka Wasa,   Shigeru Hayakawa,  

 

期刊: Applied Physics Letters  （AIP Available online 1978）
卷期: Volume 33, issue 3  

页码: 217-218

 

ISSN:0003-6951

 

年代: 1978

 

DOI:10.1063/1.90320

 

出版商: AIP

 

数据来源: AIP

 

摘要:

SAW resonators have been fabricated from reflection strip arrays of ZnO films on borosilicate glass substrates by rf sputtering and standard photolithographic processing. UnloadedQvalues were nearly 1000 and a linear temperature coefficient of about −10 ppm/°C was obtained when operated at a frequency of 100 MHz. AchievableQvalues for ZnO/glass SAW resonators at this frequency are discussed.

 

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