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High speed logic operations of all refractory Josephson integrated circuits

 

作者: Shin Kosaka,   Akira Shoji,   Masahiro Aoyagi,   Fujitoshi Shinoki,   Hiroshi Nakagawa,   Susumu Takada,   Hisao Hayakawa,  

 

期刊: Applied Physics Letters  （AIP Available online 1983）
卷期: Volume 43, issue 2  

页码: 213-215

 

ISSN:0003-6951

 

年代: 1983

 

DOI:10.1063/1.94259

 

出版商: AIP

 

数据来源: AIP

 

摘要:

A chain circuit of four‐junction logic gates consisting of all refractory junctions with niobium nitride (NbN)‐niobium (Nb) double‐layered electrodes has been fabricated with a 2.5‐&mgr;m minimum feature. A reactive ion etching technique has been used for patterning every layer such as junction electrodes, molybdenum resistors, and insulation layers. The minimum logic delay of 18 ps/gate has been obtained in the experimental circuit.

 

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